Limitations of interface sharpness in a-Si:H/a-SiC:H multilayers

journal article·1991-06

R. Schwarz, T. Fischer, P. Hanesch, T. Muschik, J. Kolodzey, H. Cerva, H.L. Meyerheim, B.M.U. Scherzer

Applied Surface Science· Volume 50· Issue 1-4

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies

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