Crystallization of sputter deposited amorphous metal thin films
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and interfaces · Metallic Glasses and Amorphous Alloys
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References (12)
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1. Tsai · J. Electrochem. Soc. (Solid State Sci. Technol.) · 1981 · 128 · 220710.1149/1.2127219 ↗
2. Murarka · J. Vacuum Sci. Technol. · 1980 · 17 · 77510.1116/1.570560 ↗
3. Wiley · 1981 · 35
4. Akitmoto · Appl. Phys. Letters · 1981 · 39 · 44510.1063/1.92733 ↗
5. Ohnishi · Appl. Phys. Letters · 1983 · 43 · 60010.1063/1.94400 ↗
6. Anderson · Thin Solid Films · 1983 · 104 · 5710.1016/0040-6090(83)90548-5 ↗
7. E.A. Dobisz, to be published.
8. Constitution of Binary Alloys
9. Constitution of Binary Alloys
10. Perepezko · 1983 · Vol. 19 · 223
11. Scott · 1983 · 148
12. The Physics of Amorphous Solids