Formation of high-density silicon dots on a silicon-on-insulator substrate

journal article·1999-04

M Tabe, M Kumezawa, T Yamamoto, S Makita, T Yamaguchi, Y Ishikawa

Applied Surface Science· Volume 142· Issue 1-4

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Abstract

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OpenAlex topics: Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence · Nanowire Synthesis and Applications

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