Low temperature VUV enhanced growth of thin silicon dioxide films
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence
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References (8)
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1. Hirose · 1989
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5. Taft · J. Electrochem. Soc. · 1984 · 131 · 246010.1149/1.2115321 ↗
6. Young · Appl. Phys. Lett. · 1987 · 50 · 4610.1063/1.98126 ↗
7. Samson · 1967
8. Yunogami · Jpn. J. Appl. Phys. · 1989 · 28 · 217210.1143/JJAP.28.2172 ↗