journal article·1999-09

Saturated adsorption of PH3 on Si(100):P and its application to digital control of phosphorus coverage on Si(100) surface

Y Tsukidate, M Suemitsu

Applied Surface Science· Volume 151· Issue 1-2
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Abstract

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Research context

OpenAlex topics: Advanced Chemical Physics Studies · Molecular Junctions and Nanostructures · Spectroscopy and Quantum Chemical Studies

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References (12)

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