Applications of doping and dedoping of Teflon AF films in microfabrication using KrF and ArF excimer lasers
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Research context
OpenAlex topics: Semiconductor Lasers and Optical Devices · Laser Material Processing Techniques · Laser Design and Applications
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References (5)
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1. Electronic Packaging, Material Sciences
2. A publication of Du Pont Co., Publication H-16577 (May 1989).
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5. Shizuka · J. Phys. Chem. · 1985 · 89 · 32010.1021/j100248a028 ↗