journal article·1992

Silicon-hydrogen bonds in silicon oxide near the SiO2/Si interface

Hiroki Ogawa, Naozumi Terada, Kazuhisa Sugiyama, Kazunori Moriki, Noriyuki Miyata, Takayuki Aoyama, Rinshi Sugino, Takashi Ito, Takeo Hattori

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Semiconductor materials and devices · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques

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References (3)

Show source-provided references
1. Kern · J. Electrochem. Soc. · 1990 · 137 · 188710.1149/1.2086825 ↗
2. Sugiyama · Jpn. J. Appl. Phys. · 1990 · 29 · L240110.1143/JJAP.29.L2401 ↗
3. Hollinger · Appl. Phys. Lett. · 1984 · 44 · 9310.1063/1.94565 ↗