journal article·1997-02

Laser-induced fast etching and metallization of SiC ceramics

S.I Dolgaev, V.V Voronov, G.A Shafeev, C Fauquet-Ben Ammar, J.-M Themlin, A Cros, W Marine

Applied Surface Science· Volume 109-110
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OpenAlex topics: Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence · Ion-surface interactions and analysis

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References (15)

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1. H.W. Bergmann, K. Schutte, E. Shubert and A. Emmel, Appl. Surf. Sci. 86 (1995) 259.10.1016/0169-4332(94)00381-5 ↗
2. Y. Hibi, Y. Enomoto, K. Kikuchi and N. Shikata, Appl. Phys. Lett. 66 (1995) 817.10.1063/1.113431 ↗
3. M. Geiger, W. Becker, T. Rebhan, J. Hutfless and N. Lutz, Appl. Surf. Sci. 96–98 (1996) 309.10.1016/0169-4332(95)00435-1 ↗
4. R. Fabbro, D. Devaux and P. Ballard, in: Proc. Int. Conf. on Laser Advanced Materials Processing, Eds. A. Matsunawa and S. Katayama (Nagaoka, Niigata, 1992) p. 269.
5. G.A. Shafeev and A.V. Simakin, Appl. Phys. A 54 (1992) 311.10.1007/BF00324194 ↗
6. A.V. Simakin and G.A. Shafeev, Appl. Surf. Sci. 86 (1995) 422.10.1016/0169-4332(94)00429-3 ↗
7. M.R. Brook and G.A. Shafeev, Appl. Surf. Sci. 54 (1992) 336.10.1016/0169-4332(92)90066-7 ↗
8. S.M. Pimenov, G.A. Shafeev, A.A. Smolin, V.A. Laptev and E.N. Loubnin, Appl. Phys. Lett. 64 (1994) 1935.10.1063/1.111747 ↗
9. R. Pini, R. Salimbeni, G. Toci and M. Vannini, in: Proc. Int. Conf. on LASER'93 (STS Press, 1994) p. 37; S.I. Dolgaev, A.A. Lyalin, A.V. Simakin and G.A. Shafeev, Quantum Electron. 23 (1996) 67 (in Russian).
10. G. Gutzeit, E.B. Saubestre and D.R. Turner, in: Electroplating Engineering Handbook, Ed. A.K. Graham, 3rd ed. (Van Nostrand Reinhold, New York, 1971).
11. V.I. Iveronova and G.P. Ryvkevich, Theory of X-ray Scattering (Moscow State University, Moscow, 1978) (in Russian).
12. G.A. Shafeev, L. Bellard, J.-M. Themlin, C. Fauquet-Ben Ammar, A. Cros and W. Marine, Appl. Phys. Lett. 68 (1996) 773.10.1063/1.116738 ↗
13. S.I. Dolgaev, A.A. Lyalin, V.V. Voronov and G.A. Shafeev, Appl. Phys. A, in press.
14. P.V. Huong, O. Segond, P. Gentilini and R. Cavagnat, Appl. Surf. Sci. 43 (1989) 256.10.1016/0169-4332(89)90221-3 ↗
15. I.S. Grigoriev and E.Z. Meilikhov, Eds., Handbook of Physics (Energoatomizdat, Moscow, 1991) (in Russian).