Flow and reaction simulation of a tungsten CVD reactor
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OpenAlex topics: Fusion materials and technologies · Metallurgical Processes and Thermodynamics · Semiconductor materials and devices
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References (10)
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2. Wahl · 1973 · 425
3. Rosten · 1987
4. Reid · 1986
5. Broadbent · J. Electrochem. Soc. · 1984 · 131 · 142710.1149/1.2115864 ↗
6. McConica · J. Electrochem. Soc. · 1986 · 133 · 254210.1149/1.2108468 ↗
7. 1965
8. Creighton · J. Electrochem. Soc. · 1989 · 136 · 27110.1149/1.2096601 ↗
9. McConica · J. Electrochem. Soc. · 1988 · 135 · 100310.1149/1.2095756 ↗
10. Bradbury · J. Electrochem. Soc. · 1986 · 133 · 121410.1149/1.2108821 ↗