VUV light-induced decomposition of palladium acetate films for electroless copper plating

journal article·1997-02

Jun-Ying Zhang, Simon L King, Ian W Boyd, Qi Fang

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Abstract

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OpenAlex topics: Electrodeposition and Electroless Coatings · Semiconductor materials and devices · Copper Interconnects and Reliability

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1. H. Esrom and U. Kogelschatz, Thin Solid Films 218 (1992) 231.10.1016/0040-6090(92)90923-Y ↗

2. R.C. Sausa, A. Cupta and J.R. White, J. Electrochem. Soc. 134 (1987) 2707.10.1149/1.2100275 ↗

3. H.S. Cole, Y.S. Liu, J.W. Rose and R. Guida, Appl. Phys. Lett. 53 (1988) 2111.10.1063/1.100292 ↗

4. H. Esrom and G. Wahl, Chemtronics 4 (1989) 216.

5. M.E. Gross, A. Appelbaum and P.K. Gallagher, J. Appl. Phys. 61 (1987)1628.10.1063/1.338049 ↗

6. A. Gupta and R. Jagannathan, Appl. Phys. Lett. 51 (1987) 2254.10.1063/1.98928 ↗

7. C.M. Harish, V. Kumar and A. Prabhakar, J. Electrochem. Soc. 135 (1988) 2903.10.1149/1.2095459 ↗

8. M.E. Gross, Chemtronics 4 (1989) 197.

9. Y. Zhang and M. Stuke, Appl. Surf. Sci. 46 (1990) 153.10.1016/0169-4332(90)90135-M ↗

10. Y.S. Liu and H.S. Cole, Chemtronics 4 (1989) 209.

11. P. Hoffmann, B. Lecohier, S. Goldoni and H. Van Den Bergh, Appl. Surf. Sci. 43 (1989) 54.10.1016/0169-4332(89)90190-6 ↗

12. H. Esrom, J.-Y. Zhang, U. Kogelschatz and A.J. Pedraza, Appl. Surf. Sci. 86 (1995) 202.10.1016/0169-4332(94)00385-8 ↗

13. H. Esrom, J. Demny and U. Kogelschatz, Chemtronics 4 (1989) 202.

14. H. Esrom and U. Kogelschatz, Appl. Surf. Sci. 46 (1990) 158.10.1016/0169-4332(90)90136-N ↗

15. H. Esrom and U. Kogelschatz, Appl. Surf. Sci. 54 (1992) 440.10.1016/0169-4332(92)90084-B ↗

16. U. Kogelschatz, Appl. Surf. Sci. 54 (1992) 410.10.1016/0169-4332(92)90080-H ↗

17. J.-Y. Zhang, Thesis, University of Karlsruhe, Germany (1993).

18. J.-Y. Zhang, H. Esrom and I.W. Boyd, Appl. Surf. Sci. 96–98 (1996) 399.10.1016/0169-4332(95)00493-9 ↗

19. J.-Y. Zhang and I.W. Boyd, to be published.

20. F.A. Lowenheim, Modern Electroplating (Wiley, New York, 1974).10.1149/1.2402361 ↗

21. P.K. Gallagher and M.E. Gross, J. Thermal. Anal. 31 (1986) 1231.10.1007/BF01914636 ↗