Observation of microstructure at the polycrystalline silicon and tungsten silicide interface
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Semiconductor materials and interfaces · Semiconductor materials and devices · Thin-Film Transistor Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (8)
Show source-provided references
1. Murarka · 1983
2. Shibata · Appl. Phys. Lett. · 1982 · 40 · 7710.1063/1.92895 ↗
3. Mohammadi · Appl. Phys. Lett. · 1979 · 35 · 52910.1063/1.91197 ↗
4. Zirinsky · Appl. Phys. Lett. · 1978 · 33 · 7610.1063/1.90151 ↗
5. Ajuria · J. Appl. Phys. · 1991 · 69 · 66210.1063/1.347346 ↗
6. Ronsheim · J. Appl. Phys. · 1991 · 69 · 49510.1063/1.347690 ↗
7. Wijaranakula · J. Electrochem. Soc. · 1990 · 137 · 298010.1149/1.2087110 ↗
8. Wagner · 1990 · Vol. 1 · 555