Improved thermal stability of cobalt silicide formed by ion beam assisted deposition on polysilicon
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OpenAlex topics: Semiconductor materials and interfaces · Force Microscopy Techniques and Applications · nanoparticles nucleation surface interactions
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References (7)
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7. Terrasi · J. Vac. Sci. Technol. A · 1994 · 12 · 28910.1116/1.578870 ↗