Profiling of carbon, oxygen and argon contamination in sputter-deposited films using nuclear backscattering and nuclear reaction spectroscopy
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OpenAlex topics: Nuclear Physics and Applications · Ion-surface interactions and analysis · Fusion materials and technologies
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References (13)
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1. Benvenutti · Appl. Phys. Lett. · 1984 · 45 · 58310.1063/1.95289 ↗
2. Barbour · Phys. Rev. B · 1988 · 38 · 700510.1103/PhysRevB.38.7005 ↗
3. Martin · Appl. Phys. Lett. · 1988 · 52 · 217710.1063/1.99761 ↗
4. Chevarier · J. Trace Microprobe Technol. · 1988 · 6 · 1
5. Chevarier · 1989
6. Halbritter · Appl. Phys. A · 1987 · 43 · 110.1007/BF00615201 ↗
7. El Bouanani · Nucl. Instr. Meth. Phys. Res. B · 1990 · 45 · 65110.1016/0168-583X(90)90919-L ↗
8. Pan · Thin Solid Films · 1981 · 78 · 2510.1016/0040-6090(81)90414-4 ↗
9. Cohen-Ganouna · Nucl. Phys. · 1963 · 40 · 8210.1016/0029-5582(63)90254-2 ↗
10. Arnell · Ark. Phys. · 1964 · 27 · 41
11. Bloch · Helv. Phys. Acta · 1967 · 40 · 832
12. Ziegler · 1985 · Vol. 1
13. El Khakani · Nucl. Instr. Meth. Phys. Res. B · 1990 · 5 · 40610.1016/0168-583X(90)90389-C ↗