Using SIMS and the NIST standard reference material #2137 to calibrate standards used in the nuclear reaction analysis of B in Si

Abstract Two different methods of using SIMS have been utilized in confirming the dose of a 11 B implanted Si reference material that has been used for many years in determining doses of 11 B ion-implanted into silicon using the 11 B ( p , α ) 8 Be nuclear reaction analysis technique. Both methods are based on the NIST SRM 2137. One method uses a B bulk-doped Si sample to transfer the calibration from the 10 B of the NIST SRM to the 11 B of the NRA standard. The other method uses two identical implants, one of 10 B and one of 11 B to accomplish the calibration transfer. The dose of the NRA standard was found to be within 5% of the quoted dose for the standard that had been used for years.