XPS studies of copper deposition from 1,5-cyclooctadiene-copper(I)-hexafluoroacetylacetonate on Si(111)
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Abstract
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Research context
OpenAlex topics: Copper Interconnects and Reliability · Semiconductor materials and devices · Metal and Thin Film Mechanics
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References (15)
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1. Hampden-Smith · MRS Bull. · 1993 · 18 · 4610.1557/S0883769400047321 ↗
2. Van Hemert · J. Electrochem. Soc. · 1965 · 112 · 112310.1149/1.2423376 ↗
3. Temple · J. Electrochem. Soc. · 1989 · 136 · 352510.1149/1.2096498 ↗
4. D. Temple, A. Reisman, Technical Report, Microelectronic Center of North Carolina, No. 4, 1988.10.5962/bhl.title.18118 ↗
5. Jain · J. Mater. Res. · 1992 · 7 · 26110.1557/JMR.1992.0261 ↗
6. Randall Creighton · Crit. Rev. Solid State Mater. Sci. · 1993 · 18 · 17510.1080/10408439308242560 ↗
7. Kumar · Chem. Mater. · 1989 · 4 · 57710.1021/cm00021a016 ↗
8. Cohen · J. Vac. Sci. Technol. A · 1992 · 10 · 86310.1116/1.577685 ↗
9. Horton · Surf. Sci. · 1997 · 375 · 17110.1016/S0039-6028(96)01282-4 ↗
10. Pope · Surf. Sci. · 1994 · 306 · 29410.1016/0039-6028(94)90073-6 ↗
11. Reynolds · Appl. Phys. Lett. · 1991 · 59 · 233210.1063/1.106060 ↗
12. E.C. Ou, Ph.D. Thesis, The University of Western Ontario, London, Canada, 1992.
13. Frost · Mol. Phys. · 1972 · 24 · 86110.1080/00268977200101961 ↗
14. Cohen · Appl. Phys. · 1991 · 1 · 50
15. J.F. Moulder, W.F. Stickle, P.E. Stobol, K.D. Bomben, Handbook of X-ray Photoelectron Spectroscopy, Perkin Elmer, Eden Prairie, 1992.