Si ALE using chlorine/hydrogen exchange. Fundamentals and films
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Semiconductor materials and devices
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References (11)
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1. Gates · J. Phys. Chem. · 1992 · 96 · 1043910.1021/j100204a058 ↗
2. Gates · Appl. Phys. Lett. · 1993 · 62 · 51010.1063/1.108895 ↗
3. Koleske · J. Appl. Phys. · 1994 · 76 · 161510.1063/1.357741 ↗
4. Nishizawa · J. Electrochem. Soc. · 1990 · 137 · 189810.1149/1.2086827 ↗
5. McIntosh · Thin Solid Films · 1993 · 225 · 18310.1016/0040-6090(93)90152-F ↗
6. Imai · Thin Solid Films · 1993 · 225 · 16810.1016/0040-6090(93)90149-J ↗
7. Coon · J. Vac. Sci. Technol. A · 1992 · 10 · 32410.1116/1.578052 ↗
8. Koleske · J. Appl. Phys. · 1992 · 72 · 407310.1063/1.352261 ↗
9. Thomas · 1979
10. Koleske · Appl. Phys. Lett. · 1994 · 64 · 88410.1063/1.110984 ↗
11. Koleske · Appl. Phys. Lett. · 1992 · 61 · 180210.1063/1.108405 ↗