XPS study of a-SixOy:H and a-SixNy:H thin films
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Abstract
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Semiconductor materials and devices · Ga2O3 and related materials
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References (9)
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2. Imamura · Appl. Phys. Letters · 1979 · 35 · 34910.1063/1.91126 ↗
3. Snell · Appl. Phys. · 1981 · 24 · 35710.1007/BF00899734 ↗
4. Chao · J. Non-Cryst. Solids · 1985 · 77/78 · 92910.1016/0022-3093(85)90813-0 ↗
5. Kubler · J. Non-Cryst. Solids · 1985 · 77/78 · 94510.1016/0022-3093(85)90817-8 ↗
6. Wagner · 1979
7. Phillips · 1973
8. Karcher · Phys. Rev. B · 1984 · 30 · 189610.1103/PhysRevB.30.1896 ↗
9. Yoshimura · MRS Spring Meeting · 1986 · 373