Excimer laser ablation for micro-machining: geometric effects
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Research context
OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Diamond and Carbon-based Materials Research
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References (3)
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1. Kelly · Nucl. Instr. Meth. B · 1985 · 7/8 · 75510.1016/0168-583X(85)90464-1 ↗
2. Dyer · Appl. Phys. Lett. · 1986 · 49 · 45310.1063/1.97113 ↗
3. Dyer · Appl. Surf. Sci. · 1995 · 86 · 1810.1016/0169-4332(94)00400-5 ↗