journal article·1994-04

Electrical behavior of low-power RF magnetron-sputtered indium tin oxide films on silicon substrate

Bi-Shiou Chiou, Shu-Ta Hsieh, Wen-Fa Wu

Applied Surface Science· Volume 74· Issue 4
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Abstract

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Research context

OpenAlex topics: ZnO doping and properties · Thin-Film Transistor Technologies · Semiconductor materials and devices

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