journal article·1997-06

Spectral shape analysis of infrared absorption of thermally grown silicon dioxide films

Naoki Yasuda, Shin-ichi Takagi, Akira Toriumi

Applied Surface Science· Volume 117-118
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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Thermography and Photoacoustic Techniques

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References (18)

Show source-provided references
1. Fitch · J. Vac. Sci. Technol. B · 1989 · 7 · 77510.1116/1.584599 ↗
2. Bjorkman · Mater. Res. Soc. Symp. Proc. · 1989 · 146 · 19710.1557/PROC-146-197 ↗
3. Yamazaki · Mater. Res. Soc. Symp. Proc. · 1994 · 318 · 41910.1557/PROC-318-419 ↗
4. Martinet · J. Appl. Phys. · 1995 · 77 · 434310.1063/1.359459 ↗
5. Ishikawa · 1995 · 500
6. Sugita · 1996 · 380
7. Satake · 1996 · 365
8. Apte · IEEE Trans. Electron Devices · 1994 · ED-41 · 159510.1109/16.310111 ↗
9. Hasegawa · J. Electrochem. Soc. · 1995 · 142 · 27310.1149/1.2043901 ↗
10. Boyd · J. Appl. Phys. · 1987 · 62 · 319510.1063/1.339320 ↗
11. Kirk · Phys. Rev. B · 1988 · 38 · 125510.1103/PhysRevB.38.1255 ↗
12. Lucovsky · J. Vac. Sci. Technol. B · 1987 · 5 · 53010.1116/1.583944 ↗
13. Sen · Phys. Rev. B · 1977 · 15 · 403010.1103/PhysRevB.15.4030 ↗
14. Properties of Silicon
15. Philipp · J. Appl. Phys. · 1979 · 50 · 105310.1063/1.326080 ↗
16. Lange · J. Appl. Phys. · 1989 · 66 · 20110.1063/1.344472 ↗
17. Montero · Phys. Rev. B · 1994 · 50 · 488110.1103/PhysRevB.50.4881 ↗
18. Engstrom · J. Appl. Phys. · 1980 · 51 · 524510.1063/1.327476 ↗