journal article·1987-10

Effect of silicon surface cleaning procedures on oxidation kinetics and surface chemistry

J.M. Delarios, C.R. Helms, D.B. Kao, B.E. Deal

Applied Surface Science· Volume 30· Issue 1-4
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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Semiconductor materials and devices · Semiconductor materials and interfaces · Silicon and Solar Cell Technologies

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