Post cleaning of chemical mechanical polishing process
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Diamond and Carbon-based Materials Research · Analytical Chemistry and Sensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (12)
Show source-provided references
1. Singer · Semicond. Int. · 1994 · 48
2. Jairath · Solid State Technol. · 1994 · 71
3. Kragelsky · 1982
4. Mouche · J. Electrochem. Soc. · 1994 · 41 · 168410.1149/1.2054983 ↗
5. Kern · 1993
6. Hunter · 1981
7. Doerner · J. Mater. Res. · 1986 · 1 · 60110.1557/JMR.1986.0601 ↗
8. Bousse · J. Coll. Interf. Sci. · 1991 · 147 · 2210.1016/0021-9797(91)90130-Z ↗
9. Bousse · J. Electroanal. Chem. · 1991 · 302 · 26910.1016/0022-0728(91)85046-R ↗
10. M. Desai, R. Jairath, M. Stell and R. Tolles, presented at 1994 Materials Research Society Spring Meeting, Boston, MA, USA.
11. Iller · 1979 · 366
12. F.A. Malik, US patent, No. 5078801.