The production of the new cubic FeN phase by reactive magnetron sputtering
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Copper Interconnects and Reliability · Semiconductor materials and devices
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References (15)
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1. Kacsich · Surface Coat. Technol. · 1997 · 93 · 3210.1016/S0257-8972(97)00035-2 ↗
2. Jacobs · J. Alloys Compounds · 1995 · 99 · 1
3. Kawamura · Thin Solid Films · 1996 · 287 · 11510.1016/S0040-6090(96)08749-4 ↗
4. Nakagawa · Hyp. Int. · 1991 · 69 · 45510.1007/BF02401863 ↗
5. M. Takahashi, H. Fujii, H. Nakagawa, S. Nasu, F. Kanamaru, in: Proceedings of the VI International Conference of Ferrites (ICF6), 1992, 508.10.1007/BF02401863 ↗
6. Suzuki · J. Alloys Compouds · 1993 · 201 · 1110.1016/0925-8388(93)90854-G ↗
7. Schaaf · Hyp. Int. · 1995 · 95 · 19910.1007/BF02146315 ↗
8. L. Rissanen, K.P. Lieb, M. Niederdrenk, O. Schulte, P. Schaaf, in: I. Ortalli (Ed.), Conference Proceedings, ICAME 95, Vol. 50, SIF, Bologna, 1996, 595.
9. Jokinen · Nucl. Instr. Meth. B · 1996 · 119 · 53310.1016/S0168-583X(96)00469-7 ↗
10. Schaaf · Z. Metallkunde · 1991 · 82 · 815
11. Gonser · Hyp. Int. · 1991 · 65 · 9510.1007/BF02395859 ↗
12. Schaaf · Hyp. Int. · 1994 · 92 · 118910.1007/BF02065754 ↗
13. Uhrmacher · Nucl. Instr. Meth. B · 1995 · 9 · 23410.1016/0168-583X(85)90688-3 ↗
14. Kündig · Nucl. Instrum. Meth. · 1969 · 75 · 33610.1016/0029-554X(69)90624-7 ↗
15. L. Rissanen, M. Neubauer, K.P. Lieb, P. Schaaf, J. All. Comp. (in press).