Filling of Si oxide into a deep trench using digital CVD method
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Plasma Diagnostics and Applications · Thin-Film Transistor Technologies
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References (7)
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1. Nishimoto · 1987 · 447
2. Tech. Dig. IEDM
3. Extended Abstr. 21th Conf. on Solid State Devices and Materials
4. Shibagaki · Jpn. J. Appl. Phys. · 1978 · 17 · 21510.1143/JJAP.17.215 ↗
5. 1975 · 13
6. 1975 · 374
7. Noguchi · 1987 · 451