Local anodic oxidation of Ni films with (2 0 0) and (1 1 1) texture

Abstract Formation of the oxide nanostructures by the local anodic oxidation of textured polycrystalline Ni(1 1 1) and Ni(2 0 0) films was investigated. It was shown that the local anodic oxidation is significantly affected by the texture of the Ni film: threshold process voltage and time required for the local anodic oxidation initiation is higher for (1 1 1) texture than for (2 0 0) texture; at the same process parameters (oxidation time, voltage, etc.) the oxide nanostructures formed on the Ni(2 0 0) are bigger than for Ni(1 1 1).