journal article·2007-08

Effect of swift (∼100MeV) heavy ion irradiation on surface morphology and electronic transport in Fe film on Si substrate

J.K. Tripathi, P.C. Srivastava

Applied Surface Science· Volume 253· Issue 21
Publisher page

Abstract

Abstract Fe film (∼50 nm) have been deposited on pSi substrate by electron beam evaporation technique. The bilayers have been irradiated by 100 MeV Fe7+ ions having fluences of 1 × 1013, 1 × 1014 and 5 × 1014 ions cm−2. SEM study of the unirradiated devices show surface modifications having a annular structures. From XRD study of the bilayer, it is observed that grain size has reduced from 70 to 25 nm after the irradiation for a fluence of 1 × 1014 ions cm−2. Moreover electronic transport data of the bilayer show practically no effect on the current flow for a fluence of 1 × 1013 ions cm−2 irradiation whereas for 1 × 1014 ions cm−2 fluence, there is very significant change in current flow (by two orders in magnitude) across the bilayer. However, for a higher fluence of irradiation 5 × 1014 ions cm−2, the bilayer becomes highly resistive. It has been found from the above observations that the fluence of 1 × 1014 ions cm−2 of swift heavy ion irradiation is a optimum fluence.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Ion-surface interactions and analysis · Semiconductor materials and devices · Integrated Circuits and Semiconductor Failure Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (33)

Show source-provided references
1. Kudryavtsev · Phys. Rev. B · 2002 · 65 · 10441710.1103/PhysRevB.65.104417 ↗
2. Chappert · Science · 1998 · 280 · 191910.1126/science.280.5371.1919 ↗
3. Veres · J. Appl. Phys. · 2000 · 87 · 850410.1063/1.373570 ↗
4. Cai · J. Appl. Phys. · 1997 · 81 · 520010.1063/1.364465 ↗
5. Mewes · Appl. Phys. Lett. · 2000 · 76 · 105710.1063/1.125937 ↗
6. Sung · J. Appl. Phys. · 2001 · 90 · 203610.1063/1.1384483 ↗
7. Maat · J. Magn. Magn. Mater. · 2003 · 265 · 110.1016/S0304-8853(03)00219-1 ↗
8. Reader · Rep. Prog. Phys. · 1992 · 56 · 139710.1088/0034-4885/56/11/002 ↗
9. Wong-Leung · Phys. Rev. B · 1999 · 59 · 799010.1103/PhysRevB.59.7990 ↗
10. Gaiduk · Phys. Rev. B · 2002 · 66 · 04531610.1103/PhysRevB.66.045316 ↗
11. Mieskes · Phys. Rev. B · 2003 · 67 · 15541410.1103/PhysRevB.67.155414 ↗
12. Michel · Appl. Surf. Sci. · 1997 · 117–118 · 29410.1016/S0169-4332(97)80097-9 ↗
13. Wang · Nucl. Instrum. Meth. B · 2003 · 209 · 19410.1016/S0168-583X(02)02028-1 ↗
14. Dhuri · Nucl. Instrum. Meth. B · 1999 · 156 · 14810.1016/S0168-583X(99)00164-0 ↗
15. Avashi · Nucl. Instrum. Meth. B · 1999 · 156 · 14310.1016/S0168-583X(99)00259-1 ↗
16. Lieb · Nucl. Instrum. Meth. B · 1999 · 245 · 12110.1016/j.nimb.2005.11.130 ↗
17. Chakraborty · Nucl. Instrum. Meth. B · 2006 · 244 · 20910.1016/j.nimb.2005.11.133 ↗
18. Neubauer · Nucl. Instrum. Meth. B · 1998 · 139 · 33210.1016/S0168-583X(97)00968-3 ↗
19. Toulemonde · Nucl. Instrum. Meth. B · 1996 · 112 · 2610.1016/0168-583X(95)01129-3 ↗
20. Milosavljevic · Nucl. Instrum. Meth. B · 2001 · 178 · 22910.1016/S0168-583X(00)00466-3 ↗
21. Bohr · Phil. Mag. · 1913 · 25 · 1010.1080/14786440108634305 ↗
22. Ziegler · 1985
23. Seitz · Solid State Phys. · 1956 · 2 · 305
24. Srivastava · Nucl. Instrum. Meth. Phys. Res. B · 2004 · 222 · 49110.1016/j.nimb.2004.03.067 ↗
25. Bolse · Nucl. Instrum. Meth. B · 2006 · 244 · 810.1016/j.nimb.2005.11.007 ↗
26. Klaumünzer · Nucl. Instrum. Meth. B · 2006 · 244 · 110.1016/j.nimb.2005.11.006 ↗
27. D. Fink, Indo German Workshop on Synthesis and Modification of Nano-Structured Materials by Energetic Ion Beam, New Delhi, India, 2005.
28. de Keljser · J. Appl. Cryst. · 1982 · 15 · 30810.1107/S0021889882012035 ↗
29. Schelp · J. Appl. Phys. · 1994 · 75 · 526210.1063/1.355725 ↗
30. Cai · J. Appl. Phys. · 2004 · 95 · 199610.1063/1.1636529 ↗
31. Srivastava · Semicond. Sci. Technol. · 2002 · 17 · L4410.1088/0268-1242/17/9/102 ↗
32. Srivastava · Vacuum · 1997 · 48 · 96510.1016/S0042-207X(97)00104-8 ↗
33. Proceedings of the International Conference on Swift Heavy Ions in Materials Engineering and Characterization, New Delhi, 1998, Nucl. Instrum. Meth. B 156, 1999.