Design, analysis and fabrication of a new MEMS scanning device actuator
Source abstract
Abstract
In this paper, an improved mechanical device for producing a large angular movement of an optical element is described. The device can be used either for angular positioning or as a dynamic angular deflecting driver for optical components or systems. The device was designed using graph-presentation methods and numerical finite element method (FEM). The device was fabricated and tested as an angular driver of thin-film tilt interference filter for dense-wavelength division demultiplexing systems (DWDM) applications. Scaling-down analysis was carried out to show micro-electro-mechanical-systems (MEMS) suitability.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Semiconductor Lasers and Optical Devices · Laser Material Processing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (11)
Show source-provided references
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