journal article·2011-03

Structure and hardness of a-C:H films prepared by middle frequency plasma chemical vapor deposition

Guangwei Guo, Guangze Tang, Yajun Wang, Xinxin Ma, Mingren Sun, Liqin Wang, Ken Yukimura

Applied Surface Science· Volume 257· Issue 10
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Abstract

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · High-pressure geophysics and materials

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