journal article·1999-08

Large-depth defect profiling in GaAs wafers after saw cutting

F Börner, S Eichler, A Polity, R Krause-Rehberg, R Hammer, M Jurisch

Applied Surface Science· Volume 149· Issue 1-4
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OpenAlex topics: Muon and positron interactions and applications · Graphene research and applications · Copper Interconnects and Reliability

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