Micromachining of polyurethane (PU) polymer using a KrF excimer laser (248nm)
Source abstract
Abstract
Abstract Polyurethane (PU) polymer, due to its biocompatibility, weather resistance, and favorable physical properties, finds a number of applications in medical implants, protective coatings, and as a prototype material for structural components in MEMS devices. An excimer laser (wavelength = 248 nm, FWHM = 25 ns) is employed for micromachining of polyurethane (PU) polymer. For air environment, the ablation rate is 0.18 μm/pulse and for underwater environment, the ablation rate is 0.07 μm/pulse (with underwater ablation threshold as 0.10 J/cm2), which concluded low taper angles (∼32°) for in air as compared to high taper angles (∼65°) with underwater micromachining. The experimental results for air and under water micromachining demonstrate ablation process as a combination of photo-thermal and photo-chemical mechanism.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Material Processing Techniques · Ocular and Laser Science Research · Laser-Ablation Synthesis of Nanoparticles
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (29)
Show source-provided references
1. Excimer laser ablation of microstructures: a numerical model10.1063/1.371816 ↗
2. History and future prospects of excimer laser technology
3. Colin · 2004
4. Basting · 2005
5. Bores · 2000
6. Recent advances in laser processing of materials
7. Characterization of KrF Excimer laser annealed PECVD SixGe1-x for MEMS post-processing10.1016/j.sna.2006.01.035 ↗
8. ArF Excimer laser micromachining of Pyrex, SiC and PZT for rapid prototyping of MEMS components10.1016/j.sna.2007.01.002 ↗
9. Dose and pressure dependence of silicon microstructure in SF6 gas due to excimer laser irradiation10.1016/j.apsusc.2008.12.024 ↗
10. Laser processing of materials
11. Excimer laser induced surface modifications and matter interaction using double-pulse-technique (DPT)10.1016/0169-4332(95)00432-7 ↗
12. Investigation of laser via formation technology for the manufacturing of high density substrates10.1016/S0143-8166(01)00057-4 ↗
13. A microscopic view of laser ablation10.1021/jp9733781 ↗
14. Fabrication of high-aspect-ratio microstructures using excimer laser10.1016/S0143-8166(03)00062-9 ↗
15. Srinivasan · 1984 · 2601
16. Kuper · Appl. Phys. · 1987 · B44 · 19910.1007/BF00692122 ↗
17. Bruan · Appl. Surf. Sci. · 1989 · 43 · 35210.1016/0169-4332(89)90238-9 ↗
18. Sutcliffe · Appl. Phys. · 1986 · 60 · 331510.1063/1.337698 ↗
19. Rumsby · Proc. SPIE · 1991 · 1598 · 3610.1117/12.51024 ↗
20. Gower · Proc. SPIE · 1992 · 1835 · 13310.1117/12.143037 ↗
21. Excimer laser machining for the fabrication of analogous microstructures10.1016/0169-4332(95)00498-X ↗
22. Projection ablation of glass-based single and arrayed microstructures using excimer laser10.1016/j.optlastec.2004.04.007 ↗
23. Underwater and water-assisted laser processing: part 2. Etching, cutting and rarely used methods10.1016/S0143-8166(02)00143-4 ↗
24. Polymer resist material for excimer ablation lithography10.1016/S0169-4332(98)00108-1 ↗
25. New polyurethane heart valve prosthesis: design, manufacture and evaluation10.1016/0142-9612(95)00242-1 ↗
26. Excimer laser induced patterning of polymeric surfaces
27. Focus variation – a robust technology for high resolution optical 3D surface metrology
28. Laser-induced decomposition and ablation dynamics studied by nanosecond interferometry – a polyurethane film10.1016/S1010-6030(01)00585-8 ↗
29. NICNAS · 2000