Intermixing at interfaces of KrF laser irradiated Co/W multilayers

Abstract The interface reactions in Co/W multilayers (ML) with Co thickness of 1 and 2 nm and W thickness of 1, 2 and 5 nm in as-deposited state and under KrF laser irradiation with fluences F=50–200 mJ/cm2 were studied by different X-ray methods. Superlattice satellites around W (1 1 0) direction were found in as-deposited and irradiated multilayers. The layered structure persists up to the highest applied fluence. Co3W compound is formed at the interfaces. However, the intermixing is low.