Laser-assisted deposition of Pd-doped diamond-like films from liquid hydrocarbons and their use for glass metallization

Abstract Deposition of both pure and Pd-doped diamond-like films (DLF) is reported under laser irradiation of the interface glass–liquid aromatic hydrocarbons. The deposited DLF are 100 nm thick and have excellent adherence to glass surface. The doping of DLF by Pd is gained by addition of Pd(acac) 2 to the liquid hydrocarbon, either benzene C 6 H 6 or toluene C 6 H 5 CH 3 . AFM imaging of the doped DLF shows the cluster-like structure of sub-micrometer size. The Pd clusters promote the CVD Cu deposition from a gas phase precursor resulting thus in the selective metal deposition on the doped DLF. Similarly, the area-selective deposition of both Cu and Ni on the doped DLF is achieved from corresponding electroless plating solutions. It is demonstrated that the DLF represents a diffusion barrier for Cu diffusion into the glass substrate.