Characterisation of Ni and Ni/Ti contact on n-type 4H-SiC
Source abstract
Abstract
Abstract In this work, we report on the structural characterisation of Ni and Ni/Ti bilayer contacts on n-type 4H-SiC. The redistribution of carbon, after annealing, in the Ni/SiC and the Ni/Ti/SiC contacts is particularly studied by RBS at 3.2 MeV, XRD and AES techniques.
The source flagged this abstract for review. Check formulas and completeness against the original publication.
Source: openaire · Quality: needs review · Source record ↗
Source flags: short_text
Source flags: short_text
Research context
OpenAlex topics: Silicon Carbide Semiconductor Technologies · Semiconductor materials and interfaces · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (21)
Show source-provided references
1. Casady · Solid-State Electron. · 1996 · 39 · 140910.1016/0038-1101(96)00045-7 ↗
2. Powell · 2002 · 942
3. Sellin · Nucl. Instrum. Methods A · 2006 · 557 · 47910.1016/j.nima.2005.10.128 ↗
4. Pécz · Appl. Surf. Sci. · 2001 · 184 · 28710.1016/S0169-4332(01)00678-X ↗
5. Badila · Diam. Relat. Mater. · 2002 · 11 · 125810.1016/S0925-9635(01)00711-7 ↗
6. La Via · Microelectron. Eng. · 2002 · 60 · 26910.1016/S0167-9317(01)00604-9 ↗
7. Lee · Solid-State Electron. · 2000 · 44 · 117910.1016/S0038-1101(00)00056-3 ↗
8. Roccaforte · J. Appl. Phys. · 2004 · 96 · 431310.1063/1.1787138 ↗
9. Petr Macháč · Appl. Surf. Sci. · 2008 · 254 · 169110.1016/j.apsusc.2007.07.130 ↗
10. Ohdomari · J. Appl. Phys. · 1987 · 62 · 374710.1063/1.339259 ↗
11. Bächli · Mater. Sci. Eng. B · 1998 · 56 · 1110.1016/S0921-5107(98)00204-9 ↗
12. Su · Inst. Phys. Conf. Ser. · 1996 · 142 · 697
13. La via · Microelectron. Eng. · 2003 · 70 · 51910.1016/S0167-9317(03)00464-7 ↗
14. Han · Appl. Phys. Lett. · 2001 · 79 · 181610.1063/1.1404998 ↗
15. Rastegaeva · Mater. Sci. Eng. B · 1997 · 46 · 25410.1016/S0921-5107(96)01989-7 ↗
16. Lu · Solid-State Electron. · 2003 · 47 · 200110.1016/S0038-1101(03)00165-5 ↗
17. Roccaforte · Appl. Surf. Sci. · 2001 · 184 · 29510.1016/S0169-4332(01)00509-8 ↗
18. Gao · Solid-State Electron. · 2000 · 44 · 187510.1016/S0038-1101(00)00099-X ↗
19. Roumié · Nucl. Instrum. Methods B · 2007 · 260 · 63710.1016/j.nimb.2007.04.159 ↗
20. Chu · 1978
21. J.F. Ziegler, SRIM-08.03, The Stopping and Range of Ions in Matter; http://www.srim.org.