Laser-induced damage of Ta2O5 films obtained from TaCl5 precursor and annealed at different temperatures
Source abstract
Abstract
Abstract In this study, Ta 2 O 5 sol was synthesized from TaCl 5 precursor, and its time dependence of the viscosity, particle size distribution and photoluminescence spectra were studied. Then, Ta 2 O 5 films were prepared using this sol and were succeeding annealed at different temperatures without carbonization and cracks. It was found that the films had good properties such as high transparency, small absorption and high laser-induced damage threshold (LIDT). The LIDT decreased with the increase of the annealing temperature probably due to the acetylacetone in the films. The laser-induced damage morphologies of the films after annealing were different. With the annealing temperature increase, the dominant factor of the laser-induced damage transformed gradually from the stress to the thermal. According to the LIDT and damage morphologies, a structure evolution model of the films annealed at different temperatures was proposed.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Semiconductor materials and devices · Laser Material Processing Techniques · High-Temperature Coating Behaviors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (33)
Show source-provided references
1. Characterization of 1064nm nanosecond laser induced damage on antireflection coatings grown by atomic layer deposition10.1364/OE.20.000854 ↗
2. Fluoroalkyl-grafted mesoporous silica antireflective films with enhanced stability in vacuum10.1364/OL.37.004095 ↗
3. Superhydrophobic antireflective silica films: fractal surfaces and laser-induced damage thresholds10.1364/AO.44.000527 ↗
4. Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol–gel process10.1088/0256-307X/24/7/049 ↗
5. Scandia optical coatings for application at 351nm10.1016/S0040-6090(00)00924-X ↗
6. Stabifization and characterization of nanosized niobium and tantalum oxide sols-optical applications for high-power lasers10.1111/j.1151-2916.1992.tb04498.x ↗
7. Laser damage studies of tantala and zirconia sol–gel coatings10.1117/12.240401 ↗
8. Fabrication of ultrathin films of Ta2O5 by a sol–gel method10.1016/j.tsf.2012.12.054 ↗
9. Preparation and performances of nanosized Ta2O5 powder photocatalyst10.1016/j.jssc.2004.11.015 ↗
10. Soft chemistry routes to transparent metal oxide thin films. The case of sol–gel synthesis and structural characterization of Ta2O5 thin films from tantalum chloromethoxide10.1016/j.tsf.2013.05.139 ↗
11. Preparation of high laser-induced damage threshold Ta2O5 films10.1016/j.apsusc.2014.05.009 ↗
12. Electronic structure and charge transport properties of amorphous Ta2O5 films10.1016/j.jnoncrysol.2007.12.013 ↗
13. Correlations between the oxygen deficiency and the laser damage resistance of different oxide films10.1016/j.apsusc.2013.10.121 ↗
14. Annealing effects on structure and laser-induced damage threshold of Ta2O5/SiO2 dielectric mirrors10.1016/S0169-4332(03)00153-3 ↗
15. Development of surface thermal lensing technique in absorption and defect analyses of optical coatings10.1117/12.634106 ↗
16. ISO 11254-1:2000: lasers and laser-related equipment-determination of laser-induced damage threshold of optical surfaces. Part 1. 1-on-1 test.
17. Laser-induced damage of a 1064nm ZnS/MgF2 narrow-band interference filter10.1364/AO.40.001950 ↗
18. ZrO2/SiO2 two-layer antireflective coatings by sol–gel process
19. Sol–gel synthesis of thick Ta2O5 films10.1021/cm062231w ↗
20. Kinetics of sol particle formation as a function of pH studied by viscosity measurements in silica solutions10.1021/la0114878 ↗
21. Theoretical modelling of the structural evolution of gels10.1016/0022-3093(88)90155-X ↗
22. Nitrogen plasma annealing for low temperature Ta2O5 films10.1063/1.120569 ↗
23. Effective photoluminescence in a large-area array of Ta2O5 nanodots
24. Lattice structure of β-Ta2O510.1016/0022-5088(64)90036-0 ↗
25. Effect of annealing temperature on the crystallization and oxygen sensing property of strontium titanate ferrite sol–gel thin films10.1016/j.snb.2012.08.071 ↗
26. Born · 1970
27. Nanosecond laser-induced damage at different initial temperatures of Ta2O5 films prepared by dual ion beam sputtering10.1063/1.4891988 ↗
28. Understanding of the abnormal wavelength effect of overcoats10.1117/12.57209 ↗
29. Effect of polyvinyl butyral on the microstructure and laser damage threshold of antireflective silica films10.1016/j.tsf.2010.11.023 ↗
30. Increased laser-damage resistance of sol–gel silica coating by structure modification10.1021/jp307390u ↗
31. Temperature effects on the LIDT of single and multilayer sol–gel derived thin film coatings10.1117/12.425014 ↗
32. Annealing effect on the optical properties and laser-induced damage resistance of sol–gel-derived ZrO2 films10.1364/JOSAB.24.001066 ↗
33. Effects of deposition parameters on laser-induced damage threshold of Ta2O5 films10.1016/j.optlastec.2009.09.004 ↗