journal article·1999-04

Formation of pyramids at surface of TMAH etched silicon

W.K Choi, J.T.L Thong, P Luo, Y Bai, C.M Tan, T.H Chua

Applied Surface Science· Volume 144-145
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Abstract

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Research context

OpenAlex topics: Advanced MEMS and NEMS Technologies · Nanowire Synthesis and Applications · Silicon Nanostructures and Photoluminescence

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References (13)

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