Laser-induced front side etching of CaF2 crystals with KrF excimer laser

Abstract The laser-induced front side etching (LIFE) of amorphous materials like fused silica was manifold studied and the LIFE process was sufficient optimized for the fabrication of well-defined etching trenches with a very low surface roughness. The LIFE process is an indirect laser-induced ablation process, the – for the used laser wavelength – transparent substrate was covered by a highly absorbing material and the absorbing process causes a transfer of the laser energy into the substrate and, finally, to an ablation process of the substrate surface. However, the structuring of crystalline materials like CaF2 is a great challenge for the LIFE process. The properties of CaF2(1 1 1) and CaF2(0 0 1) surfaces etched by KrF excimer laser pulses (pulse duration Δtp = 25 ns, wavelength λ = 248 nm) were analysed by white light interferometry (WLI) as well as scanning electron microscopy (SEM). The surface morphologies of laser etched CaF2 surfaces depend on the laser parameters and on the crystal orientation and are frequently characterized by microcracks and flake spallation. The most probable reasons therefore are laser-induced thermal stress or laser-induced shock waves.