Pulsed laser deposition of multicomponent metal and oxide films
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Laser-induced spectroscopy and plasma · Plasma Diagnostics and Applications
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References (6)
Show source-provided references
1. D. Chrisey, G. Hubler (Eds.), Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994, and references therein.
2. Metev · Appl. Surf. Sci. · 1996 · 96–98 · 12210.1016/0169-4332(95)00419-X ↗
3. M. Ozegowski, S. Metev, G. Sepold, S. Burmester, MRS Symp. Proc. 397, p. 81.
4. Busher · Phys. Rev. Lett. · 1965 · 15 · 84710.1103/PhysRevLett.15.847 ↗
5. Ageev · Izvestija VUS, Fisika · 1977 · 11 · 34
6. Demtröder · Plasma Phys. · 1970 · 12 · 69110.1088/0032-1028/12/9/004 ↗