Rheed in-plane rocking curve analysis of biaxially-textured polycrystalline MgO films on amorphous substrates grown by ion beam-assisted deposition

We have developed a method for biaxial texture determination in polycrystalline films using reflection high energy electron diffraction (RHEED) in-plane rocking curves, Experimental RHEED in-plane rocking curves were taken at 25 keV and 2.7 incidence angle from 11 nm thick, nominally [1 0 0]-textured MgO films grown on amorphous Si 3 N 4 by ion beam-assisted deposition (IBAD). The experimental RHEED in-plane rocking curves were analyzed by comparing them with RHEED in-plane rocking curves calculated using a kinematical simulation. The model enables a quantitative correlation between biaxial texture and RHEED in-plane rocking curve measurements. RHEED results are compared to X-ray rocking curve film analysis.