Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition
Source abstract
Abstract
Carbon nanosheets (CNSs) have been synthesized by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition (PECVD) using a mixture of acetylene and argon gases on copper foil as the substrate. Micrometer-wide carbon sheets consisting of several atomic layers thick graphene sheets have been synthesized by controlled decomposition of carbon radicals in ECR-PECVD. Raman spectroscopy of these films revealed characteristics of a disordered graphitic sheet. Thick folded carbon-sheets and a semi transparent freestanding CNSs have been observed by scanning electron microscopy. This is a promising technique to synthesize free standing CNSs and can be used in the fabrication of nanoelecronic devices in future. (C) 2012 Elsevier B.V. All rights reserved.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Graphene research and applications · Carbon Nanotubes in Composites · Graphene and Nanomaterials Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (24)
Show source-provided references
1. Helical microtubules of graphitic carbon10.1038/354056a0 ↗
2. C60 Buckminsterfullerene10.1038/318162a0 ↗
3. Effect of annealing on electron field emission properties of hydrogen-free amorphous carbon films10.1016/S0925-9635(00)00337-X ↗
4. Electronic confinement and coherence in patterned epitaxial graphene10.1126/science.1125925 ↗
5. A bottom-up approach from molecular nanographenes to unconventional carbon materials10.1039/b717585j ↗
6. Large area, few layer graphene films on arbitrary substrates by chemical vapore deposition10.1021/nl801827v ↗
7. Chemical methods for production of graphenes10.1038/nnano.2009.58 ↗
8. A chemical route to graphene for device applications10.1021/nl0717715 ↗
9. Role of thin Fe catalyst in the synthesis of double- and single-wall carbon nanotubes via microwave chemical vapor deposition10.1063/1.1796529 ↗
10. Carbon nanowalls grown by microwave plasma enhanced chemical vapor deposition10.1002/1521-4095(20020104)14:1<64::AID-ADMA64>3.0.CO;2-G ↗
11. Graphene based materials: past, present and future10.1016/j.pmatsci.2011.03.003 ↗
12. Initial stages of few-layer graphene growth by microwave plasma-enhanced chemical vapour deposition10.1088/0957-4484/21/9/095602 ↗
13. Electron cyclotron resonance plasma source for ion assisted deposition of thin films10.1063/1.1150225 ↗
14. A mechanism for carbon nanosheet formation10.1016/j.carbon.2007.06.017 ↗
15. Chemical vapor deposition of thin graphite films of nanometer thickness10.1016/j.carbon.2007.05.028 ↗
16. Layer-by-layer removal of graphene for device patterning10.1126/science.1199183 ↗
17. Raman spectroscopic investigation of carbon nanowalls10.1063/1.2200353 ↗
18. Probing phonon dispersion relations of graphite by double resonance Raman scattering10.1103/PhysRevLett.88.027401 ↗
19. Double resonant Raman scattering in graphite10.1103/PhysRevLett.85.5214 ↗
20. Nondispersive Raman D band activated by well-ordered interlayer interactions in rotationally stacked baitlayer graphene
21. Raman spectroscopy as a probe of carbon nanotubes10.1098/rsta.2007.2155 ↗
22. First and second order Raman scattering from finit-size crystals of graphite10.1103/PhysRevB.20.392 ↗
23. Studying disorder in graphite based systems by Raman spectroscopy10.1039/B613962K ↗
24. Contiguous petal-like carbon nanosheet outgrowths from graohite fibers by plasma CVD10.1021/am9009154 ↗