High-resolution primary ion beam probe for SIMS
Source abstract
Abstract
Abstract High-brightness negative ion beams, especially O − beams, from a compact gaseous plasma source are studied to evaluate the suitability for high-resolution SIMS. Ion-optical calculations are made using the beam parameters from the new source. Results suggest that sub-100 nm spot with O − beam current of 10 pA is achievable. Beam focusing, the resulting beam current distributions at the target and the expected instrumental performance are discussed.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Mass Spectrometry Techniques and Applications
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References (15)
Show source-provided references
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