journal article·1994-05

A practical high-power excimer lamp excited by a microwave discharge

Masayoshi Kitamura, Kaoru Mitsuka, Miroshi Sato

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Plasma Diagnostics and Applications · Plasma Applications and Diagnostics · Laser Design and Applications

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References (3)

Show source-provided references
1. Kumagai · Appl. Phys. Lett. · 1989 · 54 · 261910.1063/1.101039 ↗
2. Kumagai · Appl. Phys. Lett. · 1989 · 55 · 158310.1063/1.102247 ↗
3. Hassal · J. Appl. Phys. · 1991 · 70 · 104210.1063/1.349690 ↗