Effect of heat treatment on the properties of dc magnetron sputtered LaB6/ITO films
Source abstract
Abstract
Abstract Two types of LaB6/ITO films with different deposition times were deposited by direct current magnetron sputtering. After the films were fabricated, AFM, XRD, FESEM, Step-Height Profiler, UV–Vis Spectrophotometer and Hall Measurement Instrument were used to study their performances. After 400 °C's annealing, morphology of fracture cross-sections of the films exhibit evolutions from strongly columnar to the equiaxial (30 min), the films prepared with short time transformed from amorphous to polycrystalline, and Ar pressure generated little effect on the film's transmissivity. The resistivity declined over one order of magnitude, and the films with higher surface roughness value were more resistant, while that for films unheatreated was just the opposite.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Rare-earth and actinide compounds · Metal and Thin Film Mechanics · High-pressure geophysics and materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (14)
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