Pulsed laser deposition of Y2O3 thin films on MgO

Abstract The epitaxial relationships and the microstructure of thin Y2O3 films, grown in situ by laser ablation at 700 °C under 0.5 mbar oxygen pressure on MgO substrates are studied by X-ray and HRTEM investigations. Φ-scan experiments show that Y2O3 exhibits two different orientations, (1 1 1) and (1 0 0) on (1 0 0) single crystalline MgO substrate. The (1 1 1) variant exhibits four different epitaxial relationships in which the 〈1 1 0〉 Y2O3 in-plane direction is parallel to the 〈1 1 0〉 in-plane direction of MgO. The (1 0 0) variant appears with only one epitaxial relationship, cube Y2O3 on cube MgO. The HRTEM experiments show the columnar aspect of the Y2O3 thin film. Both (1 1 1) and (1 0 0) Y2O3 oriented grains are observed in good agreement with the X-ray experiments.