Nitriding of bulk titanium and thin titanium films in a NH3 low pressure plasma
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · MXene and MAX Phase Materials · Advanced ceramic materials synthesis
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References (10)
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6. Fehler · Rept. Progr. Phys. · 1949 · 12 · 16310.1088/0034-4885/12/1/308 ↗
7. Saunders · Sci. Progr. Oxf. · 1976 · 63 · 185
8. Ecole d'Eté Interface Semiconducteur/Electrolyte
9. Bénard · 1964
10. Nicolet · J. Vacuum Sci. Technol. · 1981 · 19 · 310.1116/1.571149 ↗