Atomic layer deposition in traveling-wave reactor: In situ diagnostics by optical reflection
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Solidification and crystal growth phenomena · Optical Coatings and Gratings · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (5)
Show source-provided references
1. T. Suntola, in: Handbook of Crystal Growth, Vol. 6, ed. D.T.J. Hurle (Elsevier, Amsterdam, 1994) p. 601.
2. D.E. Aspnes, Mater. Sci. Eng. B 30 (1995) 109.10.1016/0921-5107(94)09005-X ↗
3. Y. Kobayashi and N. Kobayashi, Jpn. J. Appl. Phys. 33 (1994) 2463.10.1143/JJAP.33.2463 ↗
4. A. Rosental, P. Adamson, A. Gerst and A. Niilisk, Appl. Surf. Sci. 107 (1996) 17810.1016/S0169-4332(96)00483-7 ↗
5. M. Born and E. Wolf, Principles of Optics (Pergamon, London, 1968).