Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices

Abstract Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4 μm wide) separated from the large electrode (20 μm wide) by 20 μm and 6 μm gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (∼100 °C) due to low Tg of polymeric material. The fluidic velocity measurement shows a maximum of about 450 μm/s in a 150 μm channel width of organic micro-fluidic devices after plasma surface modification.