Excimer lasers drive large-area microprocessing

Abstract Excimer lasers emitting in the UV to far UV region are by nature the laser sources enabling the highest optical resolution and strongest material–photon interaction. At the same time, excimer lasers deliver unmatched UV pulse energies and output powers up to the kilowatt range. Thus, they are the key to fast and effective large area processing of smallest structures with micron precision. As a consequence, excimer lasers are the UV technology of choice when it comes to high-performance microstructuring with unsurpassed quality and process repeatability in applications such as drilling advanced ink jet nozzles or patterning biomedical sensor structures.