Cu cluster adhesion enhancement on the modified Dow Cyclotene surface through low energy N2+ beam irradiation at grazing angles

Abstract In order to enrich the N content at the outer surface of Dow Cyclotene, a low permittivity polymer, a 3 keV N 2 + beam was used to implant N at various angles. Both in situ XPS analysis of the modified surface and the initial coalescence behavior of Cu clusters deposited by evaporation demonstrated that a lower angle between the beam and the surface led to N enrichment at the surface but not to the extent offered by a N 2 + plasma. The reason for this is discussed.