Asymmetric interface and growth mechanism in sputtered W/Si and WSi2/Si multilayers
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Semiconductor materials and interfaces · Silicon and Solar Cell Technologies · Microstructure and mechanical properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (31)
Show source-provided references
1. Depth-graded Mo/Si multilayer coatings for hard x-rays10.1364/OE.27.007291 ↗
2. Improving the soft X-ray reflectivity of Cr/Ti multilayers by co-deposition of B4C10.1107/S1600577520011741 ↗
3. Stabilization of Nb/Si nano-multilayers by B4C diffusion barriers
4. Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination10.1364/OL.34.000271 ↗
5. Advancements in hard x-ray multilayers for x-ray astronomy
6. D. L. Windt, S. Donguy, C. J. Hailey, J. Koglin, V. Honkimaki, E. Ziegler, F. E. Christensen, H. Chen, F. A. Harrison, W. W. Craig, W/SiC x-ray multilayers optimized for use above 100 keV, Appl. Opt. 42 (2003) 2415-2421. https://doi.org/ 10.1364/AO.42.002415.10.1364/AO.42.002415 ↗
7. Modi, Modi, Interface asymmetry in AlN/Ni and Ni/AlN interfaces: A study using resonant soft X-ray reflectivity10.1016/j.apsusc.2020.147199 ↗
8. Layer intermixing in ultrathin Cr/Be layered system and impact of barrier layers on interface region10.1016/j.apsusc.2021.151114 ↗
9. High-sensitivity x-ray/optical cross-correlator for next generation free-electron lasers10.1364/OE.398048 ↗
10. M. S. Goorsky, V. P. Kesan, J. A. Ott. And J. Angilello, “Strain relaxation and interdiffusion in Si/Si1−xGex strained layer supperlattices,” J. Vac. Sci. Technol. B 10, 2136-2151 (1992). https://doi.org /10.1116/1.586156.10.1116/1.586156 ↗
11. General laws of X-ray reflection from rough surfaces: I. Optical theorem and energy conservation law10.1134/S1063774510040012 ↗
12. Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography10.1364/OE.26.033718 ↗
13. Effect of hydrogen on Ni∕Ti multilayer neutron monochromator performance10.1063/1.2437691 ↗
14. High Thermoelectric Power Factor Realization in Si-Rich SiGe/Si Superlattices by Super-Controlled Interfaces10.1021/acsami.0c04982 ↗
15. Small D-Spacing WC/SiC Multilayers for Future Hard X-Ray Telescope Designs10.1007/s10686-006-9022-9 ↗
16. Interface roughness evolution in sputtered WSi2∕Si multilayers10.1063/1.2422713 ↗
17. Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD10.1016/S0040-6090(99)00695-1 ↗
18. High numerical aperture multilayer Laue lenses10.1038/srep09892 ↗
19. Quantitative x-ray phase imaging at the nanoscale by multilayer Laue lenses10.1038/srep01307 ↗
20. High-efficiency x-ray gratings with asymmetric-cut multilayers10.1364/JOSAA.29.000216 ↗
21. Interfacial roughness and related growth mechanisms in sputtered W/Si multilayers10.1103/PhysRevB.54.5860 ↗
22. Daillant · 2009
23. General laws of X-ray reflection from rough surfaces: II. Conformal roughness10.1134/S1063774512030133 ↗
24. X-ray reflection from rough layered systems10.1103/PhysRevB.47.15896 ↗
25. X-ray and neutron scattering from rough surfaces10.1103/PhysRevB.38.2297 ↗
26. Analysis of X-ray scattering from a rough multilayer mirror in the first-order perturbation theory10.1016/S0168-9002(02)01994-0 ↗
27. Stochastic model for thin film growth and erosion10.1063/1.109593 ↗
28. Roughness conformity during tungsten film growth: An in situ synchrotron x-ray scattering study10.1103/PhysRevB.72.045445 ↗
29. Asymmetrical diffusion at interfaces of Mg/SiC multilayers10.1364/OME.3.000546 ↗
30. Surface energy, stress and structure of well-relaxed amorphous silicon: A combination approach of ab initio and classical molecular dynamics10.1016/j.susc.2005.03.061 ↗
31. L. Vitos, A. V. Ruban, H. L. Skriver, and J. Kollár, “The surface energy of metals,” Surf. Sci. 411 (1998) 186-202. https://doi.org/ 10.1016/S0039-6028(98)00363-X.10.1016/S0039-6028(98)00363-X ↗