Low thermal budget for Si and SiGe surface preparation for FD-SOI technology

Ultra thin Silicon films of Silicon-on-Insulator technology are metastable and thus cannot be submitted to high temperature treatments that may roughen or disrupt the film during the set of technological steps required for device fabrication. This paper concerns the development of an efficient low temperature cleaning process of Si and SiGe surfaces that enables a subsequent good-quality epitaxy of raised source and drain. For this purpose wet-clean, plasma-clean and several combinations of both are used. We thus propose two effective surface cleaning processes with low thermal budget optimized for FD-SOI technology. (C) 2016 Elsevier B.V. All rights reserved.